الخلاصة

In this work, nanoflower arrays of rutile TiO2 composed of nanorods were fabricated on p-type (111)-oriented silicon substrates and, all substrates were seeded with a TiO2 seed layer synthesized by radio-frequency reactive magnetron sputtering system. Chemical bath deposition (CBD) was carried out to grow rutile TiO2 nanorods on Si substrate. Raman spectroscopy, X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) analyses showed the tetragonal rutile structure of the synthesized TiO2 nanorods. Optical properties were examined by photoluminescence spectroscopy. The spectra exhibit one strong UV emission peak. Which can be seen at around 396 nm. In the visible region, TiO2 demonstrated two dominant PL emissions centered at around 528 and 705 nm. The experimental results showed that the CBD method enabled the formation of photosensitive, high-quality rutile TiO2 nanorods with few defects for humidity sensor and in future optoelectronic nanodevice applications.